Fuzzy neural network based yield prediction model for semiconductor manufacturing system
Lihui Wu and Jie Zhang
| Year of publication: |
2010
|
|---|---|
| Authors: | Wu, Lihui ; Zhang, Jie |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 48.2010, 10/12 (15/15.5/6.), p. 3225-3243
|
| Subject: | Halbleiter | Semiconductor | Rendite | Yield | Prognoseverfahren | Forecasting model | Neuronale Netze | Neural networks | Fuzzy-Set-Theorie | Fuzzy sets | Halbleiterindustrie | Semiconductor industry |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10003975748