Fuzzy neural network based yield prediction model for semiconductor manufacturing system
| Year of publication: |
2010
|
|---|---|
| Authors: | Wu, Lihui ; Zhang, Jie |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 48.2010, 11, p. 3225-3244
|