Increasing detectability in semiconductor foundry by multivariate statistical process control
| Year of publication: |
2008
|
|---|---|
| Authors: | Yang, Chyan ; Chang, Chao-Jung ; Niu, Han-Jen ; Wu, Hsueh-Chang |
| Published in: |
Total quality management & business excellence : an official journal of the European Society for Organisational Excellence. - Abingdon, Oxfordshire : Routledge, ISSN 1478-3363, ZDB-ID 21017797. - Vol. 19.2008, 5, p. 429-440
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