Integer programming-based real-time dispatching (i-RTD) heuristic for wet-etch station at wafer fabrication
| Year of publication: |
2012
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| Authors: | Ham, M. |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 50.2012, 10 (15.5.), p. 2809-2823
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