An integrated framework of Industry 3.5 and an empirical study of simulation-based automated material handling system for semiconductor manufacturing

Chen-Fu Chien and Tzu-Yen Hong

Year of publication:	2024
Authors:	Chien, Chen-Fu ; Hong, Tzu-Yen
Subject:	Automated Material Handling System (AMHS) \| Industry 3.5 \| Industry 4.0 \| manufacturing transformation \| semiconductor manufacturing \| Halbleiterindustrie \| Semiconductor industry \| Industrie \| Manufacturing industries \| Automatisierte Produktion \| Automated manufacturing \| Halbleiter \| Semiconductor \| Automatisierung \| Automation \| Materialfluss \| Material flow \| Simulation \| Industrie 4.0 \| Produktionsplanung \| Production planning

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