Integrated tool for intelligent identification of CD process alignment, shrinkage and dynamics - Has been tested with various types of actuators Honeywell-Measurex Devron (T56)
Year of publication: |
1998
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Authors: | Heaven, M. ; Gorinevsky, D. ; Kean, M. ; Sung, C. |
Published in: |
Pulp & paper Canada. - Westmount, P.Q. : National Business Publications Ltd., ISSN 0316-4004, ZDB-ID 1921629. - Vol. 99.1998, 2, p. 40-44
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