Integration of Capacity Planning Techniques for Tool Portfolio Planning in Semiconductor Manufacturing
| Year of publication: |
2001
|
|---|---|
| Authors: | Chou, Y.-C. ; Wu, C.-S. ; Kao, C.-E. ; Hsieh, S.-H. |
| Published in: |
International journal of industrial engineering : applications and practice. - Cincinnati, ISSN 1072-4761, ZDB-ID 13637046. - Vol. 8.2001, 4, p. 279-288
|