Integration of scheduling and advanced process control in semiconductor manufacturing : review and outlook
Claude Yugma; Jakey Blue; Stéphane Dauzère-Pérès; Ali Obeid
| Year of publication: |
2015
|
|---|---|
| Authors: | Yugma, Claude ; Blue, Jakey ; Dauzère-Péres, Stéphane ; Obeid, Ali |
| Published in: |
Journal of scheduling. - New York, NY : Springer Science + Business Media LLC, ISSN 1094-6136, ZDB-ID 1492486-9. - Vol. 18.2015, 2, p. 195-205
|
| Subject: | Scheduling | Dispatching | Advanced Process Control (APC) | Semiconductor manufacturing | Halbleiterindustrie | Semiconductor industry | Scheduling-Verfahren | Scheduling problem | Prozessmanagement | Business process management | Halbleiter | Semiconductor | Produktionssteuerung | Production control | Lieferkette | Supply chain | Produktionsplanung | Production planning | Produktionswirtschaft | Production management |
| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://ebvufind01.dmz1.zbw.eu/10010504093