Joint optimisation of uncertain distributed manufacturing and preventive maintenance for semiconductor wafers considering multi-energy complementary

Jun Dong and Chunming Ye

Year of publication:	2023
Authors:	Dong, Jun ; Ye, Chunming
Subject:	distributed manufacturing \| multi-energy complementary \| preventive maintenance \| Semiconductor wafers \| uncertain \| Instandhaltung \| Maintenance policy \| Halbleiterindustrie \| Semiconductor industry \| Halbleiter \| Semiconductor \| Produktionssystem \| Manufacturing system \| Scheduling-Verfahren \| Scheduling problem \| Industrie \| Manufacturing industries

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