Modelling and analysis of waviness reduction in soft-pad grinding of wire-sawn silicon wafers by support vector regression
| Year of publication: |
2006
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|---|---|
| Authors: | Shen, Judong ; Pei, Z.J. ; Lee, E.S. ; Fisher, G.R. |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 44.2006, 13, p. 2605-2624
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