Multi-step ART1 algorithm for recognition of defect patterns on semiconductor wafers
Gyunghyun Choi, Sung-Hee Kim, Chunghun Ha and Suk Joo Bae
| Year of publication: |
2012
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|---|---|
| Authors: | Choi, Gyunghyun ; Kim, Sung-hee ; Ha, Chunghun ; Bae, Suk Joo |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 50.2012, 12 (15.6.), p. 3274-3287
|
| Subject: | neural network | pattern recognition | similarity | spatial defects | wafer map | yield management | Neuronale Netze | Neural networks | Algorithmus | Algorithm | Theorie | Theory | Halbleiterindustrie | Semiconductor industry | Revenue-Management | Revenue management | Halbleiter | Semiconductor | Mustererkennung | Pattern recognition |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://ebvufind01.dmz1.zbw.eu/10009576046