Observation of Submicronic Contacts and Vias by Scanning Ion and Electron Microscopy
Year of publication: |
1994
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Authors: | Pantel, R. ; Mascarin, G. ; Gonchond, J.P. ; Lafond, D. |
Published in: |
Quality and reliability engineering international. - Chichester [u.a.] : Wiley, ISSN 0748-8017, ZDB-ID 506412. - Vol. 10.1994, 4, p. 319-324
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