Optimal scheduling for sequentially connected cluster tools with dual-armed robots and a single input and output module
Dae-Kyu Kim, Hyun-Jung Kim and Tae-Eog Lee
| Year of publication: |
1-15 June 2017
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|---|---|
| Authors: | Kim, Dae-Kyu ; Kim, Hyun-Jung ; Lee, Tae-Eog |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 55.2017, 11/12 (1/15.6.), p. 3092-3109
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| Subject: | multi-cluster tool | optimal scheduling | robot scheduling | semiconductor manufacture | workload analysis | Roboter | Robot | Scheduling-Verfahren | Scheduling problem | Halbleiterindustrie | Semiconductor industry | Theorie | Theory |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2016.1243819 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10011655092