Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework
| Year of publication: |
2009
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|---|---|
| Authors: | Chen, Liang ; Ma, Mingda ; Jang, Shi-Shang ; Wang, David Shan-Hill ; Wang, Shuqing |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 47.2009, 15, p. 4173-4200
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