PREPARATION AND MICROSTRUCTURE OF THIN TiO2 FILMS CONTAINING Ca AND P USING MICRO-ARC OXIDATION

Micro-arc oxidation (MAO) is a novel technique for producing oxide films on metals like Al, Mg, Ti and Zr. A ceramic-like film containing Ca and P was deposited on Ti-6Al-4V substrate by MAO in an electrolytic solution using a pulsed power supply. XRD indicated that the film was a mixture of anatase, rutile and VO. SEM showed that the surface of the film was microporous with 1–2 μm pores. EDS gave the element distributions of the cross-section. The result indicated that elements like Ca and P could be incorporated into the film during MAO process. The microhardness test showed that the film had an average hardness of 540 HV0.025.