Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots
| Year of publication: |
2007
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|---|---|
| Authors: | Lee, Tae-Eog ; Lee, Hwan-Yong ; Lee, Sang-Jin |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 45.2007, 3, p. 487-508
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