Semiconductor wafer fabrication production planning using multi-fidelity simulation optimisation
Fan Zhang, Jie Song, Yingzhuo Dai and Jie Xu
| Year of publication: |
2020
|
|---|---|
| Authors: | Zhang, Fan ; Song, Jie ; Dai, Yingzhuo ; Xu, Jie |
| Subject: | multi-fidelity model | optimisation | semiconductor production planing | simulation | wafer fabrication | Simulation | Produktionsplanung | Production planning | Halbleiter | Semiconductor | Halbleiterindustrie | Semiconductor industry | Mathematische Optimierung | Mathematical programming | Scheduling-Verfahren | Scheduling problem | Theorie | Theory |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2019.1683252 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://ebvufind01.dmz1.zbw.eu/10012315481