Sequential measurement strategy for wafer geometric profile estimation
| Year of publication: |
2012
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|---|---|
| Authors: | Jin, Ran ; Chang, Chia-Jung ; Shi, Jianjun |
| Published in: |
IIE transactions / Institute of Industrial Engineers, Norcross, Ga : industrial engineering and development. - Philadelphia, Pa : Taylor & Francis, ISSN 0569-5554, ZDB-ID 2460191. - Vol. 44.2012, 1 (1.1.), p. 1-13
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