Silicon wet etching: Hillock formation mechanisms and dynamic scaling properties
Year of publication: |
2014
|
---|---|
Authors: | Mirabella, D.A. ; Suárez, G.P. ; Suárez, M.P. ; Aldao, C.M. |
Published in: |
Physica A: Statistical Mechanics and its Applications. - Elsevier, ISSN 0378-4371. - Vol. 395.2014, C, p. 105-111
|
Publisher: |
Elsevier |
Subject: | Scaling | Etching models | Monte Carlo simulations |
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