Simulation analysis of semiconductor manufacturing with small lot size and batch tool replacements
Kilian Stubbe and Oliver Rose
| Year of publication: |
2011
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|---|---|
| Authors: | Stubbe, Kilian ; Rose, Oliver |
| Published in: |
European journal of industrial engineering : EJIE. - Genevè : Inderscience Enterprises Ltd., ISSN 1751-5254, ZDB-ID 23843779. - Vol. 5.2011, 3, p. 292-312
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| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Language: | English |
| Source: |
Persistent link: https://ebvufind01.dmz1.zbw.eu/10009882595