Single-station performance evaluation and improvement in semiconductor manufacturing: A graphical approach
| Year of publication: |
2007
|
|---|---|
| Authors: | Li, Na ; Zhang, Mike Tao ; Deng, Shiming ; Lee, Zu-Hsu ; Zhang, Lawrence ; Zheng, Li |
| Published in: |
International Journal of Production Economics. - Elsevier, ISSN 0925-5273. - Vol. 107.2007, 2, p. 397-403
|
| Publisher: |
Elsevier |