Single-station performance evaluation and improvement in semiconductor manufacturing: A graphical approach
| Year of publication: |
2007
|
|---|---|
| Authors: | Li, Na ; Zhang, Mike Tao ; Deng, Shiming ; Lee, Zu-Hsu ; Zhang, Lawrence ; Zheng, Li |
| Published in: |
International journal of production economics. - Amsterdam [u.a.] : Elsevier, ISSN 0925-5273, ZDB-ID 10925260. - Vol. 107.2007, 2, p. 397-403
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