SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes
| Year of publication: |
2002
|
|---|---|
| Authors: | Fan, Shu-Kai S. ; Jiang, Bernard C. ; Jen, Chih-Hung ; Wang, Chien-Chih |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 40.2002, 13, p. 3093-3120
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