The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab
Taho Yang and Yu-An Shen; Chiwoon Cho; Yu-Ru Lin
| Year of publication: |
2012
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|---|---|
| Authors: | Yang, Taho ; Shen, Yu-An ; Cho, Chiwoon ; Lin, Yu-Ru |
| Published in: |
European journal of industrial engineering : EJIE. - Genevè : Inderscience Enterprises Ltd., ISSN 1751-5254, ZDB-ID 23843779. - Vol. 6.2012, 3, p. 281-300
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| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Language: | English |
| Source: |
Persistent link: https://www.econbiz.de/10010004579