Towards Bayesian network methodology for predicting the equipment health factor of complex semiconductor systems
| Year of publication: |
2013
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|---|---|
| Authors: | Bouaziz, Mohammed Farouk ; Zama, Eric ; Duvivier, Frdric |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 51.2013, 15 (1.8.), p. 4597-4617
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