Using in-line equipment condition and yield information for maintenance scheduling and dispatching in semiconductor wafer fabs
| Year of publication: |
2002
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|---|---|
| Authors: | Sloan, Thomas W. ; Shanthikumar, J.George |
| Published in: |
IIE transactions / Institute of Industrial Engineers, Norcross, Ga : industrial engineering and development. - Philadelphia, Pa : Taylor & Francis, ISSN 0569-5554, ZDB-ID 2460191. - Vol. 34.2002, 2, p. 191-210
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