Variability in measurements of micro lengths with a white light interferometer
| Year of publication: |
2008
|
|---|---|
| Authors: | Ferri, Carlo ; Brousseau, Emmanuel |
| Published in: |
Quality and reliability engineering international. - Chichester [u.a.] : Wiley, ISSN 0748-8017, ZDB-ID 506412. - Vol. 24.2008, 8, p. 881-890
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