Variance component analysis based fault diagnosis of multi-layer overlay lithography processes
| Year of publication: |
2009
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|---|---|
| Authors: | Yu, Jie ; Qin, S.Joe |
| Published in: |
IIE transactions / Institute of Industrial Engineers, Norcross, Ga : industrial engineering and development. - Philadelphia, Pa : Taylor & Francis, ISSN 0569-5554, ZDB-ID 2460191. - Vol. 41.2009, 9, p. 764-775
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