An analysis of the ceiling height requirement for a large-scale semiconductor fab
Year of publication: |
2010
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Authors: | Wu, Muh-Cherng ; Shih, Chang-Fu ; Chen, Chen-Fu |
Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 48.2010, 12, p. 3697-3707
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