Bulk micromachining for SOI based microsystems using double side XeF2 etching
Avinash K. Bhaskar, Muthukumaran Packirisamy and Rama B. Bhat
| Year of publication: |
2008
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|---|---|
| Authors: | Bhaskar, Avinash K. ; Packirisamy, Muthukumaran ; Bhat, Rama B. |
| Published in: |
International journal of manufacturing technology and management. - Milton Keynes [u.a.] : Inderscience Enterprises, ISSN 1368-2148, ZDB-ID 20374021. - Vol. 13.2008, 2/3/4, p. 297-307
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| Extent: | Ill., graph. Darst. |
|---|---|
| Type of publication: | Article |
| Language: | English |
| Source: |
Persistent link: https://www.econbiz.de/10009873034