Detection and classification of defect patterns on semiconductor wafers
| Year of publication: |
2006
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|---|---|
| Authors: | Wang, Chih-Hsuan ; Kuo, Way ; Bensmail, Halima |
| Published in: |
IIE transactions / Institute of Industrial Engineers, Norcross, Ga : industrial engineering and development. - Philadelphia, Pa : Taylor & Francis, ISSN 0569-5554, ZDB-ID 2460191. - Vol. 38.2006, 12, p. 1059-1068
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