Efficient scheduling approaches to time-constrained single-armed cluster tools with condition-based chamber cleaning operations
Chao Li, Fajun Yang and Lu Zhen
| Year of publication: |
2022
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|---|---|
| Authors: | Li, Chao ; Yang, Fajun ; Zhen, Lu |
| Published in: |
International journal of production research. - London [u.a.] : Taylor & Francis, ISSN 1366-588X, ZDB-ID 1485085-0. - Vol. 60.2022, 11, p. 3555-3568
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| Subject: | cleaning operation | cluster tools | scheduling | Semiconductor manufacturing | time-constrained | Scheduling-Verfahren | Scheduling problem | Halbleiterindustrie | Semiconductor industry | Regionales Cluster | Regional cluster | Clusteranalyse | Cluster analysis | Algorithmus | Algorithm |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2021.1926568 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10013499219