Hierarchical models for the spatial-temporal carbon nanotube height variations
Year of publication: |
1-15 November 2016
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Authors: | Tao, Jialing ; Wang, Kaibo ; Li, Bo ; Liu, Liang ; Cai, Qi |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 54.2016, 21/22 (1/15.11.), p. 6613-6632
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Subject: | quality control | statistical methods | semiconductor manufacturing | spatial representation | spatial–temporal model | Theorie | Theory | Halbleiterindustrie | Semiconductor industry | Qualitätsmanagement | Quality management | Statistische Methode | Statistical method | Treibhausgas-Emissionen | Greenhouse gas emissions |
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