Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing
| Year of publication: |
2007
|
|---|---|
| Authors: | Hsu, Shao-Chung ; Chien, Chen-Fu |
| Published in: |
International Journal of Production Economics. - Elsevier, ISSN 0925-5273. - Vol. 107.2007, 1, p. 88-103
|
| Publisher: |
Elsevier |