A system for online detection and classification of wafer bin map defect patterns for manufacturing intelligence
| Year of publication: |
2013
|
|---|---|
| Authors: | Chien, Chen-Fu ; Hsu, Shao-Chung ; Chen, Ying-Jen |
| Published in: |
International journal of production research : American Institute of Industrial Engineers ; Society of Manufacturing Engineers. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 1604776. - Vol. 51.2013, 8 (1.4.), p. 2324-2338
|