Multi-source AdaBoost with cross-weight method for virtual metrology in semiconductor manufacturing
Tianhui Wang, Jaeseung Baek, Myong-Kee Jeong, Seongho Seo and Jaekyung Choi
| Year of publication: |
2024
|
|---|---|
| Authors: | Wang, Tianhui ; Baek, Jaeseung ; Jeong, Myong Kee ; Seo, Seongho ; Choi, Jaekyung |
| Subject: | AdaBoost | multi-source data | semiconductor manufacturing | sensor fusion | virtual metrology | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor | Virtuelle Organisation | Virtual organization | Virtuelle Realität | Virtual reality |
Online Resource
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2024.2318490 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10015084969