Multi-source adaptive thresholding adaboost with application to virtual metrology
Yifan Xie, Tianhui Wang, Myong K. Jeong and Gyeong Taek Lee
| Year of publication: |
2024
|
|---|---|
| Authors: | Xie, Yifan ; Wang, Tianhui ; Jeong, Myong Kee ; Lee, Gyeong Taek |
| Subject: | Boosting | ensemble learning | multi-source data fusion | robust | semiconductor manufacturing process | virtual metrology |
Online Resource
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2024.2314151 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10015053787