Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems
Wenliang Chen, Zheng Wang, Felix T.S. Chan
| Year of publication: |
16 September 2017
|
|---|---|
| Authors: | Chen, Wenliang ; Wang, Zheng ; Chan, Felix T. S. |
| Published in: |
European journal of operational research : EJOR. - Amsterdam : Elsevier, ISSN 0377-2217, ZDB-ID 243003-4. - Vol. 261.2017, 3 (16.9.), p. 929-940
|
| Subject: | Production | Queueing | Robust production capacity planning | Semiconductor manufacturing | Bi-objective optimization | Kapazitätsplanung | Capacity planning | Produktionskapazität | Production capacity | Halbleiterindustrie | Semiconductor industry | Produktionsplanung | Production planning | Warteschlangentheorie | Queueing theory | Halbleiter | Semiconductor | Scheduling-Verfahren | Scheduling problem | Losgröße | Lot size |