Sparse group principal component analysis using elastic-net regularisation and its application to virtual metrology in semiconductor manufacturing
Geonseok Lee, Tianhui Wang, Dohyun Kim and Myong-Kee Jeong
| Year of publication: |
2025
|
|---|---|
| Authors: | Lee, Geonseok ; Wang, Tianhui ; Kim, Dohyun ; Jeong, Myong Kee |
| Subject: | Principal component analysis(PCA) | sparse learning | feature extraction | sensor reduction | alternating direction method ofmultipliers (ADMM) |
Online Resource
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2024.2361854 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10015198396