The use of a simulation, a hybrid Taguchi, and dual response surface methods in the automated material handling system tool-to-tool strategy for a 300-mm fab
Year of publication: |
2012
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Authors: | Yang, Taho ; Shen, Yu-An ; Cho, Chiwoon ; Lin, Yu-Ru |
Published in: |
European journal of industrial engineering : EJIE. - Genevè : Inderscience Enterprises Ltd., ISSN 1751-5254, ZDB-ID 2384377-9. - Vol. 6.2012, 3, p. 281-300
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Subject: | Genichi Taguchi | Innerbetrieblicher Transport | Internal transport | Fließfertigung | Assembly-line production | Automatisierte Produktion | Automated manufacturing | Halbleiterindustrie | Semiconductor industry | Simulation | Taiwan |
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