Wafer fabrication yield learning and cost analysis based on in-line inspection
Israel Tirkel, Gad Rabinowitz, David Price and Doug Sutherland
| Year of publication: |
1-15 June 2016
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|---|---|
| Authors: | Tirkel, Israel ; Rabinowitz, Gad ; Price, David ; Southerland, Doug |
| Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 54.2016, 11/12 (1/15.6.), p. 3578-3590
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| Subject: | cost | inspection | learning | semiconductor | yield | Lernprozess | Learning process | Theorie | Theory | Halbleiterindustrie | Semiconductor industry | Halbleiter | Semiconductor |
| Type of publication: | Article |
|---|---|
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Other identifiers: | 10.1080/00207543.2015.1106609 [DOI] |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10011497571