Yield prediction via spatial modeling of clustered defect counts across a wafer map
| Year of publication: |
2007
|
|---|---|
| Authors: | Bae, Suk Joo ; Hwang, Jung Yoon ; Kuo, Way |
| Published in: |
IIE transactions / Institute of Industrial Engineers, Norcross, Ga : industrial engineering and development. - Philadelphia, Pa : Taylor & Francis, ISSN 0569-5554, ZDB-ID 2460191. - Vol. 39.2007, 12, p. 1073-1084
|