A run-to-run controller for product surface quality improvement
Year of publication: |
2014
|
---|---|
Authors: | Bao, Lulu ; Wang, Kaibo ; Wu, Tianying |
Published in: |
International journal of production research. - London : Taylor & Francis, ISSN 0020-7543, ZDB-ID 160477-6. - Vol. 52.2014, 15 (1.8.), p. 4469-4487
|
Subject: | Kriging | process modelling | run-to-run control | silicon wafer | Qualitätsmanagement | Quality management | Produktionssteuerung | Production control | Halbleiterindustrie | Semiconductor industry | Simulation | USA | United States | Theorie | Theory |
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