Increasing detectability in semiconductor foundry by multivariate statistical process control
Chyan Yang, Chao-Jung Chang, Han-Jen Niu and Hsueh-Chang Wu
| Year of publication: |
2008
|
|---|---|
| Authors: | Yang, Chyan ; Chang, Chao-Jung ; Niu, Han-Jen ; Wu, Hsueh-Chang |
| Published in: |
Total quality management & business excellence. - Abingdon, Oxfordshire : Routledge, ISSN 1478-3363, ZDB-ID 2101779-7. - Vol. 19.2008, 5/6, p. 429-440
|
| Subject: | Halbleiterindustrie | Semiconductor industry | Statistische Qualitätskontrolle | Statistical quality control | Hotelling-Modell | Hotelling model | Taiwan |
| Extent: | graph. Darst. |
|---|---|
| Type of publication: | Article |
| Type of publication (narrower categories): | Aufsatz in Zeitschrift ; Article in journal |
| Language: | English |
| Source: | ECONIS - Online Catalogue of the ZBW |
Persistent link: https://www.econbiz.de/10003740713